MASS ANALYZED SECONDARY ION MICROSCOPY

被引：16

作者：

BERNIUS, MT ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,BAKER LAB,ITHACA,NY 14853

来源：

关键词：

D O I：

10.1063/1.1139523

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1789 / 1804

页数：16

共 79 条

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[3] COMBINED ION PROBE SPARK SOURCE ANALYSIS SYSTEM
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[4] THE APPLICATION OF LIQUID-METAL ION SOURCES TO ION MICROPROBE SECONDARY ION MASS-SPECTROSCOPY
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WAUGH, AR
VOHRALIK, P
[J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (5-6) : 717 - 723
[5] SIMS MICRO-ANALYSIS WITH A GALLIUM ION MICROPROBE
BAYLY, AR
WAUGH, AR
ANDERSON, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 375 - 382
[6] BAYLY AR, 1986, SIMS, V5, P253
[7] BERNARD R, 1958, C R ACAD SCI PARIS, V246, P166
[8] DARK-FIELD STIGMATIC ION MICROSCOPY FOR STRUCTURAL CONTRAST ENHANCEMENT
BERNIUS, MT
LING, YC
MORRISON, GH
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (10) : 3332 - 3338
[9] EVALUATION OF ION MICROSCOPIC SPATIAL-RESOLUTION AND IMAGE QUALITY
BERNIUS, MT
LING, YC
MORRISON, GH
[J]. ANALYTICAL CHEMISTRY, 1986, 58 (01) : 94 - 101
[10] ELIMINATION OF RESIDUAL IMAGE DISTORTION IN THE STIGMATIC ION-MICROSCOPE
BERNIUS, MT
LING, YC
MORRISON, GH
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) : 1677 - 1681