EFFECTIVE P-TYPE DOPING OF DIAMOND BY BORON ION-IMPLANTATION

被引:80
作者
BRAUNSTEIN, G [1 ]
KALISH, R [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,HAIFA,ISRAEL
关键词
D O I
10.1063/1.332262
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:2106 / 2108
页数:3
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