ROLE OF HYDROGEN IN SPUTTERING OF NICKEL-CHROMIUM FILMS

被引：26
|
作者：
STERN, E
CASWELL, HL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1967年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.1492534
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：128 / &
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