SECONDARY ION MASS-SPECTROMETRY AND ELECTRICAL CHARACTERIZATION OF ZN DIFFUSION IN N-TYPE INP

被引：62
作者：
BLAAUW, C
SHEPHERD, FR
EGER, D
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期
关键词：
D O I：
10.1063/1.343525
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：605 / 610
页数：6
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