PROPERTIES OF ANODIC FILMS FORMED ON REACTIVELY SPUTTERED TANTALUM

[1] TANTALUM PRINTED CAPACITORS [J]. PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1959, 47 (06): : 1070 - 1075

[2] BERRY RW, 1964 P EL COMP C, P86

[3] EFFECTS OF NITROGEN METHANE + OXYGEN ON STRUCTURE + ELECTRICAL PROPERTIES OF THIN TANTALUM FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) : 402 - &

[4] SUPERCONDUCTING THIN FILMS OF NIOBIUM, TANTALUM, TANTALUM NITRIDE, TANTALUM CARBIDE, AND NIOBIUM NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) : 936 - 942

[5] Gerstenberg D., 1963, ANN PHYSIK, V11, P354

[6] GERSTENBERG D, UNPUBLISHED RESULTS

[7] GERSTENBERG D, 1962 P EL COMP C, P57

[8] GULDNER WG, PRIVATE COMMUNICATIO

[9] GULDNER WG, 1964 P EL COMP C, P9

[10] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[1] TANTALUM PRINTED CAPACITORS [J]. PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1959, 47 (06): : 1070 - 1075

[2] BERRY RW, 1964 P EL COMP C, P86

[3] EFFECTS OF NITROGEN METHANE + OXYGEN ON STRUCTURE + ELECTRICAL PROPERTIES OF THIN TANTALUM FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) : 402 - &

[4] SUPERCONDUCTING THIN FILMS OF NIOBIUM, TANTALUM, TANTALUM NITRIDE, TANTALUM CARBIDE, AND NIOBIUM NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) : 936 - 942

[5] Gerstenberg D., 1963, ANN PHYSIK, V11, P354

[6] GERSTENBERG D, UNPUBLISHED RESULTS

[7] GERSTENBERG D, 1962 P EL COMP C, P57

[8] GULDNER WG, PRIVATE COMMUNICATIO

[9] GULDNER WG, 1964 P EL COMP C, P9

[10] Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700