COMPUTER-SIMULATION OF SPUTTERING OF CLUSTERS

被引：113

作者：

HARRISON, DE ^{[1
]}

DELAPLAIN, CB ^{[1
]}

机构：

[1] USN,POSTGRAD SCH,MONTEREY,CA 93940

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.323014

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2252 / 2259

页数：8

共 9 条

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[3]

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[5]

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[8]

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[9] MASS SPECTROMETRIC STUDY OF NEUTRAL PARTICLES SPUTTERED FROM CU BY 0- TO 100-EV AR IONS [J].

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