CHANNELING EFFECTS ON BUBBLE PROPAGATION FOR 8-MU-M-PERIOD ION-IMPLANTED PROPAGATION PATTERNS

被引：0
作者：
WEN, WG
GUAN, GX
CHAO, XD
WEI, J
GAO, GW
WU, ZY
LEE, ZY
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 08期
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D O I：
10.1063/1.334667
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：4049 / 4051
页数：3
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