TIN OXIDE OVERCOATS FOR THIN-FILM MAGNETIC RECORDING MEDIA

被引：5
|
作者：
NOVOTNY, VJ
KAO, AS
机构：
[1] IBM Research Division, Almaden Research Center, 650 Harry Road San Jose
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1990年 / 26卷 / 05期
关键词：
D O I：
10.1109/20.104776
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Material and tribological properties of reactively sputtered tin oxide, SnO2, films were determined as a function of deposition conditions. Increased substrate deposition temperature improves hardness and lowers wear rate. Oxygen partial pressure around 0.01 Pa yields maximum hardness and minimum stress and wear rate. Films prepared at these partial pressures and 150°C are stoichlometric and crystalline. Thin film magnetic recording media with lubricated tin oxide overcoats have low static friction and good start/stop lifetimes. © 1990 IEEE
引用
收藏
页码：2499 / 2501
页数：3
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