HIGH-SPEED DATA-PROCESSING FOR 3-DIMENSIONAL ANALYSIS BY MICRO-RBS

被引：16
|
作者：
TAKAI, M
KATAYAMA, Y
KINOMURA, A
LOHNER, T
NAMBA, S
RYSSEL, H
机构：
[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN
[2] FRAUNHOFER ARBEITSGRP INTEGRIERTE SCHALTUNGEN,W-8520 ERLANGEN,GERMANY
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 64卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(92)95480-F
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A data acquisition system with CAMAC modules has been developed for two- and three-dimensional elemental mapping analysis using an RBS microprobe. The data acquisition system can store all RBS energy spectra for each of the scanned positions. This capability can be easily enhanced by memory expansion of the host computer.
引用
收藏
页码：277 / 281
页数：5
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