DEGRADATION MECHANISM IN SI-DOPED AL/SI CONTACTS AND AN EXTREMELY STABLE METALLIZATION SYSTEM

被引：14

作者：

MORI, M

KANAMORI, S

UEKI, T

机构：

来源：

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY | 1983年 / 6卷 / 02期

关键词：

D O I：

10.1109/TCHMT.1983.1136163

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：159 / 162

页数：4

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[6]

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[8]

PROKOP GS, 1970, 8TH ANN REL PHYS S P, P121

[9] SLT DEVICE METALLURGY AND ITS MONOLITHIC EXTENSION [J].

TOTTA, PA ;

SOPHER, RP .