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INVESTIGATION OF INFLUENCE OF LOW-TEMPERATURE ANNEALING TREATMENTS ON INTERFACE STATE DENSITY AT SI-SIO2 INTERFACE
被引:46
作者
:
YEOW, YT
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
YEOW, YT
[
1
]
LAMB, DR
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
LAMB, DR
[
1
]
BROTHERTON, SD
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
BROTHERTON, SD
[
1
]
机构
:
[1]
UNIV SOUTHAMPTON,DEPT ELECTR,SOUTHAMPTON SO9 5NH,ENGLAND
来源
:
JOURNAL OF PHYSICS D-APPLIED PHYSICS
|
1975年
/ 8卷
/ 13期
关键词
:
D O I
:
10.1088/0022-3727/8/13/011
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:1495 / &
相关论文
共 14 条
[1]
ELECTRICAL CHARACTERISTICS OF MOS STRUCTURES ON LESS THAN 111 GREATER THAN AND LESS THAN 100 GREATER THAN ORIENTED N-TYPE SILICON AS INFLUENCED BY USE OF HYDROGEN-CHLORIDE DURING THERMAL OXIDATION
BACCARANI, G
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
BACCARANI, G
SEVERI, M
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
SEVERI, M
SONCINI, G
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
SONCINI, G
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1973,
120
(10)
: 1436
-
1438
[2]
BALK P, 1969, 1969 SAN FRANC M EL
[3]
HYDRIDES AND HYDROXYLS IN THIN SILICON DIOXIDE FILMS
BECKMANN, KH
论文数:
0
引用数:
0
h-index:
0
BECKMANN, KH
HARRICK, NJ
论文数:
0
引用数:
0
h-index:
0
HARRICK, NJ
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(04)
: 614
-
&
[4]
TEST FOR LATERAL NONUNIFORMITIES IN MOS DEVICES USING ONLY CAPACITANCE CURVES
BREWS, JR
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TELE LABS,MURRAY HILL,NJ 07974
BELL TELE LABS,MURRAY HILL,NJ 07974
BREWS, JR
LOPEZ, AD
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TELE LABS,MURRAY HILL,NJ 07974
BELL TELE LABS,MURRAY HILL,NJ 07974
LOPEZ, AD
[J].
SOLID-STATE ELECTRONICS,
1973,
16
(11)
: 1267
-
1277
[5]
DESCRIPTION OF SIO2-SI INTERFACE PROPERTIES BY MEANS OF VERY LOW FREQUENCY MOS CAPACITANCE MEASUREMENTS
CASTAGNE, R
论文数:
0
引用数:
0
h-index:
0
CASTAGNE, R
VAPAILLE, A
论文数:
0
引用数:
0
h-index:
0
VAPAILLE, A
[J].
SURFACE SCIENCE,
1971,
28
(01)
: 157
-
+
[6]
LOW-TEMPERATURE REDUCTION OF FAST SURFACE STATES ASSOCIATED WITH THERMALLY OXIDIZED SILICON
CASTRO, PL
论文数:
0
引用数:
0
h-index:
0
CASTRO, PL
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(02)
: 280
-
+
[7]
CHOU MJ, 1971, J ELECTROCHEM SOC, V118, P614
[8]
CHARACTERISTICS OF FAST SURFACE STATES ASSOCIATED WITH SIO2-SI AND SI3N4-SIO2-SI STRUCTURES
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
DEAL, BE
MACKENNA, EL
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
MACKENNA, EL
CASTRO, PL
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
CASTRO, PL
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1969,
116
(07)
: 997
-
&
[9]
SURFACE STATES IN SILICON FROM CHARGES IN OXIDE COATING
GOETZBERGER, A
论文数:
0
引用数:
0
h-index:
0
GOETZBERGER, A
HEINE, V
论文数:
0
引用数:
0
h-index:
0
HEINE, V
NICOLLIAN, EH
论文数:
0
引用数:
0
h-index:
0
NICOLLIAN, EH
[J].
APPLIED PHYSICS LETTERS,
1968,
12
(03)
: 95
-
+
[10]
KOOI E, 1966, PHILIPS RES REP, V21, P477
←
1
2
→
共 14 条
[1]
ELECTRICAL CHARACTERISTICS OF MOS STRUCTURES ON LESS THAN 111 GREATER THAN AND LESS THAN 100 GREATER THAN ORIENTED N-TYPE SILICON AS INFLUENCED BY USE OF HYDROGEN-CHLORIDE DURING THERMAL OXIDATION
BACCARANI, G
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
BACCARANI, G
SEVERI, M
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
SEVERI, M
SONCINI, G
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV BOLOGNA, FAC INGN, IST ELETTR, BOLOGNA, ITALY
SONCINI, G
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1973,
120
(10)
: 1436
-
1438
[2]
BALK P, 1969, 1969 SAN FRANC M EL
[3]
HYDRIDES AND HYDROXYLS IN THIN SILICON DIOXIDE FILMS
BECKMANN, KH
论文数:
0
引用数:
0
h-index:
0
BECKMANN, KH
HARRICK, NJ
论文数:
0
引用数:
0
h-index:
0
HARRICK, NJ
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(04)
: 614
-
&
[4]
TEST FOR LATERAL NONUNIFORMITIES IN MOS DEVICES USING ONLY CAPACITANCE CURVES
BREWS, JR
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TELE LABS,MURRAY HILL,NJ 07974
BELL TELE LABS,MURRAY HILL,NJ 07974
BREWS, JR
LOPEZ, AD
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TELE LABS,MURRAY HILL,NJ 07974
BELL TELE LABS,MURRAY HILL,NJ 07974
LOPEZ, AD
[J].
SOLID-STATE ELECTRONICS,
1973,
16
(11)
: 1267
-
1277
[5]
DESCRIPTION OF SIO2-SI INTERFACE PROPERTIES BY MEANS OF VERY LOW FREQUENCY MOS CAPACITANCE MEASUREMENTS
CASTAGNE, R
论文数:
0
引用数:
0
h-index:
0
CASTAGNE, R
VAPAILLE, A
论文数:
0
引用数:
0
h-index:
0
VAPAILLE, A
[J].
SURFACE SCIENCE,
1971,
28
(01)
: 157
-
+
[6]
LOW-TEMPERATURE REDUCTION OF FAST SURFACE STATES ASSOCIATED WITH THERMALLY OXIDIZED SILICON
CASTRO, PL
论文数:
0
引用数:
0
h-index:
0
CASTRO, PL
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
DEAL, BE
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(02)
: 280
-
+
[7]
CHOU MJ, 1971, J ELECTROCHEM SOC, V118, P614
[8]
CHARACTERISTICS OF FAST SURFACE STATES ASSOCIATED WITH SIO2-SI AND SI3N4-SIO2-SI STRUCTURES
DEAL, BE
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
DEAL, BE
MACKENNA, EL
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
MACKENNA, EL
CASTRO, PL
论文数:
0
引用数:
0
h-index:
0
机构:
Fairchild Semiconductor Research and Development Laboratory, Palo Alto, California
CASTRO, PL
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1969,
116
(07)
: 997
-
&
[9]
SURFACE STATES IN SILICON FROM CHARGES IN OXIDE COATING
GOETZBERGER, A
论文数:
0
引用数:
0
h-index:
0
GOETZBERGER, A
HEINE, V
论文数:
0
引用数:
0
h-index:
0
HEINE, V
NICOLLIAN, EH
论文数:
0
引用数:
0
h-index:
0
NICOLLIAN, EH
[J].
APPLIED PHYSICS LETTERS,
1968,
12
(03)
: 95
-
+
[10]
KOOI E, 1966, PHILIPS RES REP, V21, P477
←
1
2
→