ACHROMATIC FOCUSING FOR PROBEFORMING OF HIGH-RESOLUTION MICROBEAMS

被引：7
作者：
TAPPER, UAS
机构：
[1] Department of Nuclear Physics, Lund Institute of Technology, S-223 62 Lund
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 56-7卷
关键词：
D O I：
10.1016/0168-583X(91)95010-B
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The possibility to use achromatic quadrupole lenses for probe forming of high resolution microbeams is reviewed. To measure the harmonic contamination in an achromatic lens the grid shadow method has to be utilized. The grid shadow pattern can also guide during the alignment of the lenses. Computer calculations show that the Lund achromatic triplet should be able to produce a 100 nm beam probe. Finally a computer controlled beam focussing system is described.
引用
收藏
页码：712 / 716
页数：5
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