HIGH-RESOLUTION OPTICAL-RECORDING ON A-SI FILMS

被引：9
作者：
GOTCHIYAEV, VZ
KOROLKOV, VP
SOKOLOV, AP
CHERNUKHIN, VP
机构：
[1] Institute of Automation, Electrometry USSR Academy of Sci., Novosibirsk
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1991年 / 137卷
关键词：
D O I：
10.1016/S0022-3093(05)80361-8
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The changes in optical properties and structure of a-Si films under laser annealing and spatial resolution of optical recording has been studied. The mechanism of the observed changes is discussed. The spatial resolution of up to 2000 lines/mm has been obtained. The difference of solubility for irradiated and nonirradiated regions of the samples has been observed. It is shown that the optical recording on a-Si films is promising for producing of half-tone photomasks of kinofom optical elements.
引用
收藏
页码：1297 / 1300
页数：4
相关论文
共 50 条
[21]   APPLICATION OF PHTHALOCYANINE THIN-FILMS IN OPTICAL-RECORDING [J].
GU, DH ;
CHEN, QY ;
TANG, XD ;
GAN, FX ;
SHEN, SY ;
LIU, K ;
XU, HJ .
OPTICS COMMUNICATIONS, 1995, 121 (4-6) :125-129
[22]   MEDIA FOR HIGH-DENSITY OPTICAL-RECORDING [J].
BARTOLINI, RA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01) :70-74
[23]   HIGH-DENSITY OPTICAL-RECORDING BY SUPERRESOLUTION [J].
YAMANAKA, Y ;
HIROSE, Y ;
KUBOTA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 :197-200
[24]   HIGH-CAPACITY OPTICAL-RECORDING CHANNELS [J].
CHENG, DC ;
HURST, JE ;
LYNCH, RT ;
OLSON, RW .
IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (06) :3227-3232
[25]   HIGH-DENSITY OPTICAL-RECORDING CARTRIDGE [J].
EVENTOFF, AT ;
KENNEY, GC .
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 329 :252-257
[26]   MEDIA FOR HIGH-DENSITY OPTICAL-RECORDING [J].
BARTOLINI, RA .
OPTICAL ENGINEERING, 1981, 20 (03) :382-386
[27]   DYES FOR OPTICAL-RECORDING [J].
MATSUOKA, M .
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1993, 224 :85-94
[28]   THE FUTURE OF OPTICAL-RECORDING [J].
THOMAS, GE .
VLSI AND COMPUTER PERIPHERALS: VLSI AND MICROELECTRONIC APPLICATIONS IN INTELLIGENT PERIPHERALS AND THEIR INTERCONNECTION NETWORKS, 1989, :P1-P1
[29]   POLYMERS IN OPTICAL-RECORDING [J].
ZAGER, SA ;
GALLOWAY, L .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 192 :109-PMSE
[30]   POLYMERS IN OPTICAL-RECORDING [J].
PEARSON, JM .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 192 :3-PMSE
12345