THE RESOLUTION OF LASER LITHOGRAPHY ON THIN METAL-FILMS

被引：0

作者：

VEIKO, VP

TUCHKOVA, EA

YAKOVLEV, EB

机构：

来源：

KVANTOVAYA ELEKTRONIKA | 1984年 / 11卷 / 04期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：661 / 665

页数：5

共 13 条

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[7] THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS [J].

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[8] STRUCTURAL INVESTIGATION OF LASER MACHINING OF THIN BISMUTH FILMS [J].

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[9]

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[10]

VEIKO VP, 1982, KVANTOVAYA ELEKTRON+, V9, P2167

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