ELECTRON-BEAM TESTING - METHODS AND APPLICATIONS

被引:56
作者
FEUERBAUM, HP
机构
关键词
D O I
10.1002/sca.4950050103
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
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页码:14 / 24
页数:11
相关论文
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[11]   VOLTAGE CONTRAST LINEARIZATION WITH A HEMISPHERICAL RETARDING ANALYZER [J].
FENTEM, PJ ;
GOPINATH, A .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (11) :930-933
[12]   BEAM CHOPPER FOR SUB-NANOSECOND PULSES IN SCANNING ELECTRON-MICROSCOPY [J].
FEUERBAUM, HP ;
OTTO, J .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (06) :529-532
[13]  
FEUERBAUM HP, 1978, SCANNING ELECTRON MI, V1, P795
[14]  
FEUERBAUM HP, 1979, SEM, V1, P285
[15]  
FEUERBAUM HP, 1981, MICROCIRCUIT ENG, P507
[16]  
FLEMMING JP, 1970, SCANNING ELECTRON MI, P465
[17]   FUNCTION TESTING OF BIPOLAR ICS AND LSIS WITH THE STROBOSCOPIC SCANNING ELECTRON-MICROSCOPE [J].
FUJIOKA, H ;
NAKAMAE, K ;
URA, K .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) :177-183
[18]  
GONZALES AJ, 1975, TECHNICAL DIGEST IED, P119
[19]  
GONZALES AJ, 1978, J VAC SCI TECHNOL, P837
[20]   DEFLECTION BEAM-CHOPPING IN SEM [J].
GOPINATH, A ;
HILL, MS .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (03) :229-236