ELECTRON-BEAM TESTING - METHODS AND APPLICATIONS

被引:56
作者
FEUERBAUM, HP
机构
关键词
D O I
10.1002/sca.4950050103
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:14 / 24
页数:11
相关论文
共 44 条
[1]  
BALK LJ, 1976, SCANNING ELECTRON MI, V1, P615
[2]  
BEHERA SK, 1972, 10 ANN P REL PHYS, P5
[3]  
CRICHTON G, 1981, GROSSINTEGRATION, V77, P99
[4]  
CRICHTON G, 1980, IEEE TEST C, P444
[5]  
Crosthwait D. L., 1974, Scanning Electron Microscopy 1974, P935
[6]   PULSED PHOTOMULTIPLIERS [J].
DEMARCO, F ;
PENCO, E .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (09) :1158-&
[7]  
DRIVER MC, 1969, SCANNING ELECTRON MI, P403
[8]   EVALUATION OF PASSIVATED INTEGRATED CIRCUITS USING THE SCANNING ELECTRON MICROSCOPE [J].
EVERHART, TE ;
WELLS, OC ;
MATTA, RK .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) :929-936
[9]  
FAZEKAS P, 1982, COMMUNICATION
[10]  
FAZEKAS P, 1981, ELECTRONICS, V14, P105