PRODUCTION AND PROPERTIES OF CONDUCTING CARBON-FILMS

被引：9
作者：
PIRKER, K [1 ]
SCHALLAUER, R [1 ]
FALLMANN, W [1 ]
OLCAYTUG, F [1 ]
URBAN, G [1 ]
JACHIMOWICZ, A [1 ]
KOHL, F [1 ]
PROHASKA, O [1 ]
机构：
[1] VIENNA TECH UNIV,LUDWIG BOLTZMANN INST BIOMED MIKROTECH,A-1040 VIENNA,AUSTRIA
来源：
THIN SOLID FILMS | 1986年 / 138卷 / 01期
关键词：
D O I：
10.1016/0040-6090(86)90222-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：121 / 129
页数：9
相关论文
共 50 条
[21]   TRIBOLOGICAL PROPERTIES OF HARD CARBON-FILMS - EXTREMELY LOW FRICTION MECHANISM OF AMORPHOUS HYDROGENATED CARBON-FILMS AND AMORPHOUS HYDROGENATED SIC FILMS IN VACUUM [J].
MIYAKE, S .
SURFACE & COATINGS TECHNOLOGY, 1992, 55 (1-3) :563-569
[22]   OBSERVATIONS ON EVAPORATED CARBON-FILMS [J].
MAHL, H ;
MOLDNER, K .
MIKROSKOPIE, 1973, 28 (11-1) :343-343
[23]   ELECTRICAL RESISTIVITY OF CARBON-FILMS [J].
KUPPERMAN, DS ;
CHAU, CK ;
WEINSTOCK, H .
CARBON, 1973, 11 (03) :171-175
[24]   GRAPHITIZATION OF THIN CARBON-FILMS [J].
GOMA, J ;
OBERLIN, M .
THIN SOLID FILMS, 1980, 65 (02) :221-232
[25]   ELECTRICAL RESISTIVITY OF CARBON-FILMS [J].
KUPPERMA.DS ;
CHAU, CK .
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (03) :344-&
[26]   THE EFFECT OF STABILIZATION ON THE PROPERTIES OF PAN-BASED CARBON-FILMS [J].
KO, TH ;
YANG, CC ;
CHANG, WT .
CARBON, 1993, 31 (04) :583-590
[27]   PRESSURE AND PLASMA EFFECTS ON THE PROPERTIES OF MAGNETRON SPUTTERED CARBON-FILMS [J].
ROSSNAGEL, SM ;
RUSSAK, MA ;
CUOMO, JJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2150-2153
[28]   GRAPHITIZATION OF THIN CARBON-FILMS [J].
GOMA, J ;
OBERLIN, M ;
OBERLIN, A .
CARBON, 1977, 15 (06) :414-414
[29]   STRENGTHS OF EVAPORATED CARBON-FILMS [J].
CALL, T ;
STONER, JO ;
BASHKIN, S .
NUCLEAR INSTRUMENTS & METHODS, 1979, 167 (01) :33-34
[30]   STRUCTURAL, ELECTRICAL AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS [J].
MEMMING, R .
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1990, 199 :73-PMSE
12345