EMISSION-SPECTRA OF SIH(A2-DELTA-]X2II) AND SICL2(A1B1-]X1A1) IN THE VUV PHOTOLYSES OF SILANE AND CHLORINATED SILANES

被引：62
|
作者：
WASHIDA, N
MATSUMI, Y
HAYASHI, T
IBUKI, T
HIRAYA, A
SHOBATAKE, K
机构：
[1] ULVAC CORP,CHIGASAKI,KANAGAWA 253,JAPAN
[2] KYOTO UNIV,INST CHEM RES,UJI,KYOTO 611,JAPAN
[3] INST MOLEC SCI,OKAZAKI,AICHI 444,JAPAN
来源：
JOURNAL OF CHEMICAL PHYSICS | 1985年 / 83卷 / 06期
关键词：
D O I：
10.1063/1.449227
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：2769 / 2774
页数：6
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