EMISSION-SPECTRA OF SIH(A2-DELTA-]X2II) AND SICL2(A1B1-]X1A1) IN THE VUV PHOTOLYSES OF SILANE AND CHLORINATED SILANES

被引：62

作者：

WASHIDA, N

MATSUMI, Y

HAYASHI, T

IBUKI, T

HIRAYA, A

SHOBATAKE, K

机构：

[1] ULVAC CORP,CHIGASAKI,KANAGAWA 253,JAPAN

[2] KYOTO UNIV,INST CHEM RES,UJI,KYOTO 611,JAPAN

[3] INST MOLEC SCI,OKAZAKI,AICHI 444,JAPAN

来源：

JOURNAL OF CHEMICAL PHYSICS | 1985年 / 83卷 / 06期

关键词：

D O I：

10.1063/1.449227

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：2769 / 2774

页数：6

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