SYNTHESIS OF HETEROEPITAXIAL SI/COSI2/SI STRUCTURES BY CO IMPLANTATION INTO SI

被引：68

作者：

VANOMMEN, AH

OTTENHEIM, JJM

THEUNISSEN, AML

MOUWEN, AG

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 08期

关键词：

D O I：

10.1063/1.100641

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：669 / 671

页数：3

共 9 条

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