NEW CONTACTLESS METHOD FOR LIFETIME MEASUREMENT IN SEMICONDUCTOR WAFERS

被引：10

|

作者：

HLAVKA, J

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1983年 / 54卷 / 10期

关键词：

D O I：

10.1063/1.1137251

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1386 / 1391

页数：6

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