SILICON PROCESSING WITH SILICON-CARBIDE FURNACE COMPONENTS

被引：0
|
作者：
FOSTER, BD [1 ]
TRESSLER, RE [1 ]
机构：
[1] PENN STATE UNIV,DEPT POLICY SCI & PUBL AFFAIRS,UNIVERSITY PK,PA 16802
来源：
SOLID STATE TECHNOLOGY | 1984年 / 27卷 / 10期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：143 / 146
页数：4
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