INVESTIGATION OF GERMANIUM FILMS AND GE-SI INTERFACE STRUCTURE BY TRANSMISSION ELECTRON-MICROSCOPY

被引：5
作者：
ASEEV, AL
VASIN, OI
STENIN, SI
SOLDATENKO, NN
TKHORIK, YA
机构：
[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
[2] ACAD SCI UKSSR,SEMICOND INST,KIEV,UKSSR
来源：
THIN SOLID FILMS | 1975年 / 30卷 / 01期
关键词：
D O I：
10.1016/0040-6090(75)90306-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：73 / 82
页数：10
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