EPITAXIAL CRYSTAL-GROWTH BY SPUTTER DEPOSITION - APPLICATIONS TO SEMICONDUCTORS .1.

被引：64
作者：
GREENE, JE [1 ]
机构：
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1983年 / 11卷 / 01期
关键词：
D O I：
10.1080/01611598308243645
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：47 / 97
页数：51
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