GRAIN-GROWTH MECHANISMS IN POLYSILICON

被引：68

作者：

MEI, L ^{[1
]}

RIVIER, M ^{[1
]}

KWARK, Y ^{[1
]}

DUTTON, RW ^{[1
]}

机构：

[1] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 08期

关键词：

D O I：

10.1149/1.2124295

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1791 / 1795

页数：5

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