EVALUATION OF THE GAS PUFF Z-PINCH AS AN X-RAY-LITHOGRAPHY AND MICROSCOPY SOURCE

被引：43

作者：

BAILEY, J

ETTINGER, Y

FISHER, A

FEDER, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 01期

关键词：

D O I：

10.1063/1.92908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / 35

页数：3

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