MASKLESS LASER PATTERNING OF INSULATING FILMS FROM SALT-SOLUTIONS

被引：5
|
作者：
VANGUTFELD, RJ
VIGLIOTTI, DR
WELLS, OC
KHANNA, VD
OSULLIVAN, EJ
机构：
[1] IBM Research Division, Yorktown Heights, NY 10598
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 24期
关键词：
5;
D O I：
10.1063/1.111275
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Insulating thin-film patterns have been deposited on a variety of metal surfaces using focused laser light incident on samples submerged in both electrolytic and electroless nickel solutions. Deposits occur only where the laser radiation is absorbed by the substrate. For a single scan, the patterned film can have dimensions as small as 25 nm in height, 4 mum in width. Scanning electron microscope and electrical probing measurements confirm the insulating nature of the films.
引用
收藏
页码：3348 / 3350
页数：3
相关论文
共 50 条
  • [31] INVESTIGATION OF FREEZING OF SALT-SOLUTIONS IN CELLS
    HAYASHI, Y
    KOMORI, T
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1979, 101 (03): : 459 - 464
  • [32] EFFECTS OF SALT-SOLUTIONS ON GLASS DISSOLUTION
    FENG, X
    PEGG, IL
    PHYSICS AND CHEMISTRY OF GLASSES, 1994, 35 (02): : 98 - 103
  • [33] SURFACE-TENSION OF SALT-SOLUTIONS
    ABRAMZON, AA
    GAUKHBERG, RD
    RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 1993, 66 (11) : 1985 - 1990
  • [34] THE ESTIMATION OF GAS SOLUBILITIES IN SALT-SOLUTIONS
    HERMANN, C
    DEWES, I
    SCHUMPE, A
    CHEMICAL ENGINEERING SCIENCE, 1995, 50 (10) : 1673 - 1675
  • [35] SURFACE-TENSION OF SALT-SOLUTIONS
    ABRAMZON, AA
    GAUKHBERG, RD
    RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 1993, 66 (09) : 1643 - 1650
  • [36] ELECTROCHEMICAL-BEHAVIOR OF FILMS OF MOLYBDENUM(VI) OXIDE IN AQUEOUS SALT-SOLUTIONS
    VERESHCHAGINA, IS
    TIKHONOV, KI
    ROMINYAN, AL
    SOVIET ELECTROCHEMISTRY, 1982, 18 (05): : 613 - 617
  • [37] PULP RESPONSE TO OXALATE SALT-SOLUTIONS
    PASCON, EA
    DENG, H
    LANGELAND, K
    JOURNAL OF DENTAL RESEARCH, 1986, 65 : 250 - 250
  • [38] SOLUBILITY OF FIBRINOGEN IN DILUTE SALT-SOLUTIONS
    LEAVIS, PC
    ROTHSTEIN, F
    ARCHIVES OF BIOCHEMISTRY AND BIOPHYSICS, 1974, 161 (02) : 671 - 682
  • [39] SOLUBILITY OF ADENOSINE IN CONCENTRATED SALT-SOLUTIONS
    GABRIELYAN, AG
    BIOFIZIKA, 1977, 22 (05): : 789 - 793
  • [40] PHYSICOCHEMICAL PROPERTIES OF TRIPHENYLVINYLPHOSPHONIUM SALT-SOLUTIONS
    SHEVCHUK, MI
    MEGERA, IV
    RUDI, VP
    KIRMAER, MA
    ZHURNAL OBSHCHEI KHIMII, 1978, 48 (02): : 324 - 326
12345