MASKLESS LASER PATTERNING OF INSULATING FILMS FROM SALT-SOLUTIONS

被引：5
作者：
VANGUTFELD, RJ
VIGLIOTTI, DR
WELLS, OC
KHANNA, VD
OSULLIVAN, EJ
机构：
[1] IBM Research Division, Yorktown Heights, NY 10598
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 24期
关键词：
5;
D O I：
10.1063/1.111275
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Insulating thin-film patterns have been deposited on a variety of metal surfaces using focused laser light incident on samples submerged in both electrolytic and electroless nickel solutions. Deposits occur only where the laser radiation is absorbed by the substrate. For a single scan, the patterned film can have dimensions as small as 25 nm in height, 4 mum in width. Scanning electron microscope and electrical probing measurements confirm the insulating nature of the films.
引用
收藏
页码：3348 / 3350
页数：3
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