QUANTUM-WELL GAAS/ALGAAS SHALLOW-DONOR FAR-INFRARED PHOTOCONDUCTORS GROWN BY MOLECULAR-BEAM EPITAXY

被引:15
作者
GOODHUE, WD [1 ]
MUELLER, ER [1 ]
LARSEN, DM [1 ]
WALDMAN, J [1 ]
CHAI, YH [1 ]
LAI, SC [1 ]
JOHNSON, GD [1 ]
机构
[1] UNIV MASSACHUSETTS,LOWELL,MA 01854
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 03期
关键词
D O I
10.1116/1.586746
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Photoconductors utilizing planar-doped silicon shallow donors in GaAs quantum wells formed with AlGaAs barriers have been fabricated and measured to have far-infrared (FIR) resonant-wavelength responsivities of approximately 1 V W-1, with noise equivalent power values of approximately 1 X 10(-7) W Hz-1/2 at 4 K. The technology makes possible the use of FIR photoconductive magnetospectroscopy to measure the well position of sheet-doped silicon ions when incorporated at doping levels below 1 X 10(16) CM-3. A comparison of the measured position of the ions with the intended position reveals a discrepancy that can be linked to the growth parameters used to produce the structure.
引用
收藏
页码:941 / 944
页数:4
相关论文
共 10 条
[1]   EXCITED-STATE SPECTROSCOPY OF CONFINED SHALLOW DONOR IMPURITIES IN A MULTI-QUANTUM-WELL [J].
GRIMES, RT ;
STANAWAY, MB ;
CHAMBERLAIN, JM ;
DUNN, JL ;
HENINI, M ;
HUGHES, OH ;
HILL, G .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (04) :305-307
[2]   QUASI-2-DIMENSIONAL RESONANT BOUND POLARONS [J].
HUANT, S ;
KNAP, W ;
MARTINEZ, G ;
ETIENNE, B .
EUROPHYSICS LETTERS, 1988, 7 (02) :159-164
[3]   BINDING OF SHALLOW DONOR IMPURITIES IN QUANTUM-WELL STRUCTURES [J].
JAROSIK, NC ;
MCCOMBE, BD ;
SHANABROOK, BV ;
COMAS, J ;
RALSTON, J ;
WICKS, G .
PHYSICAL REVIEW LETTERS, 1985, 54 (12) :1283-1286
[4]   MAGNETOOPTICAL STUDY OF DONOR-LEVEL CROSSING IN TIPPED GAAS/(GA,AL)AS QUANTUM-WELLS [J].
MUELLER, ER ;
GOODHUE, WD ;
LARSEN, DM ;
BALES, JW ;
WALDMAN, J .
PHYSICAL REVIEW B, 1991, 44 (04) :1754-1761
[5]   DEFINITIVE IDENTIFICATION OF D- CENTERS IN GAAS QUANTUM-WELLS BY TILT-INDUCED LINE SPLITTING IN A MAGNETIC-FIELD [J].
MUELLER, ER ;
LARSEN, DM ;
WALDMAN, J ;
GOODHUE, WD .
PHYSICAL REVIEW LETTERS, 1992, 68 (14) :2204-2207
[6]  
MUELLER ER, 1992, THESIS U MASSACHUSET
[7]   IMPURITY TRAPPING, INTERFACE STRUCTURE, AND LUMINESCENCE OF GAAS QUANTUM WELLS GROWN BY MOLECULAR-BEAM EPITAXY [J].
PETROFF, PM ;
MILLER, RC ;
GOSSARD, AC ;
WIEGMANN, W .
APPLIED PHYSICS LETTERS, 1984, 44 (02) :217-219
[8]  
SCHUBERT EF, 1990, APPL PHYS LETT, V57, P1800
[9]  
STILLMAN GE, 1977, SEMICONDUCT SEMIMET, V12, P169
[10]   CRYSTAL ORIENTATION DEPENDENCE OF SILICON DOPING IN MOLECULAR-BEAM EPITAXIAL ALGAAS/GAAS HETEROSTRUCTURES [J].
WANG, WI ;
MENDEZ, EE ;
KUAN, TS ;
ESAKI, L .
APPLIED PHYSICS LETTERS, 1985, 47 (08) :826-828