ON THE USE OF THE AUGER TECHNIQUE FOR QUANTITATIVE-ANALYSIS OF OVERLAYERS

被引：56
作者：
MEMEO, R
CICCACCI, F
MARIANI, C
OSSICINI, S
机构：
来源：
THIN SOLID FILMS | 1983年 / 109卷 / 02期
关键词：
D O I：
10.1016/0040-6090(83)90135-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：159 / 167
页数：9
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