OPTICAL PROFILOMETRY AND ITS APPLICATION TO MECHANICALLY INACCESSIBLE SURFACES .1. PRINCIPLES OF FOCUS ERROR-DETECTION

被引：24

作者：

VISSCHER, M ^{[1
]}

STRUIK, KG ^{[1
]}

机构：

[1] EINDHOVEN UNIV TECHNOL,DEPT MECH ENGN,5600 MB EINDHOVEN,NETHERLANDS

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1994年 / 16卷 / 03期

关键词：

OPTICAL PROFILOMETRY; SURFACE ROUGHNESS MEASUREMENT; FOCUS ERROR DETECTION; DEFECT OF FOCUS SYSTEM;

D O I：

10.1016/0141-6359(94)90124-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Optical profilometers can in principle be used to measure the roughness of surfaces that are not accessible for mechanical profilometers. Optical measurements can be performed through a transparent layer because of the noncontacting nature of the measuring principle. In this article the properties of a focus error detection system are given for the general case of scanning free surfaces and for the particular case of a glass plate lying on the scanned surface. Tests show that scanning through a glass plate is possible, but there are some limitations. The conditions under which proper measurements can be performed are described. Some examples of scanning through a transparent layer will be presented in part II of this paper.

引用

页码：192 / 198

页数：7

共 10 条

[1]

Visscher, Hendriks, Struik, Optical profilometry and its application to mechanically inaccessible surfaces. Part II: application to elastomer/glass contacts, Prec Eng, 16, pp. 199-204, (1994)

[2]

Wyant, Koliopoulis, Bhushan, Basila, Development of a three-dimensional noncontact digital optical profiler, J Trib Trans ASME F, 108, pp. 1-8, (1986)

[3]

Dong, Blunt, Stout, Comparison of the conformity of surface topography measured by optical and stylus instruments, Proceedings of the 7th ASPE annual meeting, pp. 313-316, (1992)

[4]

Sherrington, Smith, Modern measurement techniques in surface metrology: part II: optical instruments, Wear, 125, pp. 289-308, (1988)

[5]

WYKO Corporation, Rough surface tester model RST-documentation sheet 129-3-892, (1992)

[6]

Mitsui, In-process sensors for surface roughness and their applications, Prec Eng, 8, pp. 212-220, (1986)

[7]

Kagami, Hatazawa, Koike, Measurement of surface profiles by the focusing method, Wear, 134, pp. 221-229, (1989)

[8]

Braat, Read out of optical discs, Principles of Optical Disc Systems, (1987)

[9]

Bouwhuis, Braat, Video disk player optics, Appl Optics, 17, pp. 1993-2000, (1978)

[10]

Claesen, Het meetsysteem van de AFM, M.Sc. Thesis, report no. WPA1335, (1992)

← 1 →