共 13 条
[1]
ALFREY T., 1996, J POLYM SCI C, V12, P249, DOI DOI 10.1002/P0LC.5070120119
[2]
Crank J., 1966, MATH DIFFUSION
[6]
KWEI TK, 1966, J POLYM SCI C, V12, P249
[7]
PETERLIN A, 1969, MAKROMOLEKUL CHEM, V124, P136
[8]
POLYMETHACRYLONITRILE AS A RESIST IN X-RAY-LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (01)
:82-86
[9]
SCHLEGEL L, 1988, THESIS TU BERLIN
[10]
SOTOBAYASHI H, BESSY1984 ANN REP, P190