SURFACE-TOPOGRAPHY OF OXIDES ON INP THERMALLY GROWN AT HIGH-TEMPERATURES

被引:9
|
作者
MCLAREN, JJ
NELSON, A
GEIB, K
GANN, R
WILMSEN, CW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 03期
关键词
D O I
10.1116/1.572174
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1486 / 1490
页数:5
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