HIGH-PERFORMANCE MULTILEVEL BLAZED X-RAY MICROSCOPY FRESNEL ZONE PLATES - FABRICATED USING X-RAY-LITHOGRAPHY

被引：37
|
作者：
DIFABRIZIO, E
GENTILI, M
GRELLA, L
BACIOCCHI, M
KRASNOPEROVA, A
CERRINA, F
YUN, W
LAI, B
GLUSKIN, E
机构：
[1] UNIV WISCONSIN,CTR XRAY LITHOG,DEPT ELECT & COMP ENGN,MADISON,WI 53706
[2] ARGONNE NATL LAB,ARGONNE,IL 60439
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587414
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3979 / 3985
页数：7
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