RF-PLASMA DEPOSITION OF HYDROGENATED HARD CARBON THIN-FILMS

被引：0

作者：

BUBENZER, A

DISCHLER, B

BRANDT, G

KOIDL, P

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1983年 / 401卷

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D O I：

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中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：321 / 327

页数：7

共 18 条

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ANDERSON, DA .

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[3] PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES [J].

ANDERSSON, LP ;

BERG, S ;

NORSTROM, H ;

OLAISON, R ;

TOWTA, S .

THIN SOLID FILMS, 1979, 63 (01) :155-160

[4]

Angus J. C., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P433

[5] ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS [J].

BANKS, BA ;

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :807-814

[6] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J].

BERG, S ;

ANDERSSON, LP .

THIN SOLID FILMS, 1979, 58 (01) :117-120

[7] OPTICAL-PROPERTIES OF HYDROGENATED HARD CARBON THIN-FILMS [J].

BUBENZER, A ;

DISCHLER, B ;

NYAIESH, A .

THIN SOLID FILMS, 1982, 91 (01) :81-87

[8] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].

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KAY, E .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971

[9]

CRAIG S, 1982, THIN SOLID FILMS, V97, P234

[10]

DISCHLER B, 1983, UNPUB APPL PHYS LETT

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