HIGH-FREQUENCY AND HIGH-RESOLUTION CAPACITANCE MEASURING CIRCUIT FOR PROCESS TOMOGRAPHY

被引:58
作者
YANG, WQ
STOTT, AL
BECK, MS
机构
[1] UNIST, Manchester
来源
IEE PROCEEDINGS-CIRCUITS DEVICES AND SYSTEMS | 1994年 / 141卷 / 03期
关键词
CAPACITANCE MEASUREMENT; CIRCUIT DESIGN; PROCESS TOMOGRAPHY;
D O I
10.1049/ip-cds:19941019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A stray-immune AC capacitance measuring circuit has been developed for electrical capacitance tomography. For this application a high excitation frequency is essential to achieve high sensitivity and fast data collection rates, and also to reduce the effect of any conductive component in parallel with the measured capacitance. A high excitation frequency has been made possible by using some novel methods: (a) a high frequency digital signal generator; (b) parameter-optimised AC amplifiers and (c) a phase-sensitive demodulator utilising CMOS switches. With a 500 kHz excitation signal the circuit has good linearity and stability, and a resolution of 0.035 fF.
引用
收藏
页码:215 / 219
页数:5
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