THE GROWTH-CHARACTERISTICS OF ION-BEAM SPUTTERED COCR FILMS ON TA ISOLATION LAYERS

被引:15
|
作者
GILL, HS
YAMASHITA, T
机构
[1] Hewlett-Packard Lab, Palo Alto, CA,, USA, Hewlett-Packard Lab, Palo Alto, CA, USA
关键词
D O I
10.1109/TMAG.1984.1063377
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
7
引用
收藏
页码:776 / 778
页数:3
相关论文
共 50 条
  • [31] ON THE PROPERTIES OF ION-BEAM SPUTTERED CuInSe2 THIN FILMS.
    Bonhoure, F.
    Dagoury, G.
    Vigner, D.
    Lesueur, R.
    Vide, les Couches Minces, 1981, 36 (207): : 541 - 545
  • [32] Structure and properties of ion-beam sputtered AsxS1-x films
    Mikhailov, MD
    Kryzhanowsky, II
    Petcherizin, IM
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 265 (1-2) : 1 - 8
  • [33] ENHANCED ENDURANCE LIFE OF SPUTTERED MOSX FILMS ON STEEL BY ION-BEAM MIXING
    KOBS, K
    DIMIGEN, H
    HUBSCH, H
    TOLLE, HJ
    LEUTENECKER, R
    RYSSEL, H
    MATERIALS SCIENCE AND ENGINEERING, 1987, 90 : 281 - 286
  • [34] ON THE PROPERTIES OF ION-BEAM SPUTTERED CUINSE2 THIN-FILMS
    BONHOURE, F
    DAGOURY, G
    VIGNER, D
    LESUEUR, R
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1981, 36 (207): : 541 - 550
  • [35] CHARACTERISTICS OF ION-BEAM-SPUTTERED THIN-FILMS
    KANE, SM
    AHN, KY
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 171 - 174
  • [36] Assessing a growth anomaly in ion-beam sputtered non-stoichiometric NiOx
    Becker, M.
    Riedl, P.
    Kaupe, J.
    Michel, F.
    Polity, A.
    Mitic, S.
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (13)
  • [37] BORON ION-BEAM EXPOSURE CHARACTERISTICS OF METACRYLATE-TYPE LAYERS
    KISZA, M
    OLESZKIEWICZ, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 869 - 871
  • [38] CHARACTERISTICS OF W FILMS FORMED BY ION-BEAM ASSISTED DEPOSITION
    KOH, YB
    GAMO, K
    NAMBA, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2648 - 2652
  • [39] REDEPOSITION OF SPUTTERED SPECIES BY ELECTRIC-FIELDS OF AN INCIDENT ION-BEAM AND SPUTTERED ION
    HELBIG, HF
    ADELMANN, PJ
    MILLER, AC
    CZANDERNA, AW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 379 - 383
  • [40] ION-BEAM DEPOSITION OF FERROELECTRIC THIN-FILMS SPUTTERED FROM MULTICOMPONENT TARGETS
    CASTELLANO, RN
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (02): : 629 - 633