THE GROWTH-CHARACTERISTICS OF ION-BEAM SPUTTERED COCR FILMS ON TA ISOLATION LAYERS

被引:15
|
作者
GILL, HS
YAMASHITA, T
机构
[1] Hewlett-Packard Lab, Palo Alto, CA,, USA, Hewlett-Packard Lab, Palo Alto, CA, USA
关键词
D O I
10.1109/TMAG.1984.1063377
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
7
引用
收藏
页码:776 / 778
页数:3
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