PLASMA IMMERSION ION-IMPLANTATION USING PLASMAS GENERATED BY RADIO-FREQUENCY TECHNIQUES

被引：197
作者：
TENDYS, J [1 ]
DONNELLY, IJ [1 ]
KENNY, MJ [1 ]
POLLOCK, JTA [1 ]
机构：
[1] CSIRO,DIV APPL PHYS,LUCAS HTS RES LABS,MENAI,NSW 2234,AUSTRALIA
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 22期
关键词：
D O I：
10.1063/1.100299
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2143 / 2145
页数：3
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