PREFERENTIAL NUCLEATION ALONG SIO2 STEPS IN AMORPHOUS SI

[1] REORDERING OF AMORPHOUS LAYERS OF SI IMPLANTED WITH P-31, AS-75, AND B-11 IONS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4234 - 4240

[2] Grove A. S., 1967, PHYS TECHNOL S, P29

[3] MICRO-PROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION TECHNIQUE .1. DETERMINATION OF CRYSTALLOGRAPHIC ORIENTATIONS OF POLYCRYSTAL-SILICON SURFACES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (01): : 145 - 153

[4] SOLID-PHASE LATERAL EPITAXY OF CHEMICAL-VAPOR-DEPOSITED AMORPHOUS-SILICON BY FURNACE ANNEALING [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2847 - 2849

[5] LAUDISE RA, 1970, GROWTH SINGLE CRYSTA, P118

[6] DAMAGE-DEPENDENT ELECTRICAL ACTIVATION OF ION-IMPLANTED SILICON .1. EXPERIMENTS ON PHOSPHORUS IMPLANTS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 223 - 230

[7] Miyao M., 1984, 16TH C SOL STAT DEV, P511

[8] PAMPLIN BR, 1980, CRYST GROWTH, P4

[9] Roth J. A., 1982, Laser and Electron Beam Interactions with Solids. Proceedings of the Materials Research Society Annual Meeting, P169

[10] SAITO T, 1984, 15TH P S ION IMPL SU, P9

[1] REORDERING OF AMORPHOUS LAYERS OF SI IMPLANTED WITH P-31, AS-75, AND B-11 IONS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4234 - 4240

[2] Grove A. S., 1967, PHYS TECHNOL S, P29

[3] MICRO-PROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION TECHNIQUE .1. DETERMINATION OF CRYSTALLOGRAPHIC ORIENTATIONS OF POLYCRYSTAL-SILICON SURFACES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (01): : 145 - 153

[4] SOLID-PHASE LATERAL EPITAXY OF CHEMICAL-VAPOR-DEPOSITED AMORPHOUS-SILICON BY FURNACE ANNEALING [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2847 - 2849

[5] LAUDISE RA, 1970, GROWTH SINGLE CRYSTA, P118

[6] DAMAGE-DEPENDENT ELECTRICAL ACTIVATION OF ION-IMPLANTED SILICON .1. EXPERIMENTS ON PHOSPHORUS IMPLANTS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) : 223 - 230

[7] Miyao M., 1984, 16TH C SOL STAT DEV, P511

[8] PAMPLIN BR, 1980, CRYST GROWTH, P4

[9] Roth J. A., 1982, Laser and Electron Beam Interactions with Solids. Proceedings of the Materials Research Society Annual Meeting, P169

[10] SAITO T, 1984, 15TH P S ION IMPL SU, P9