4-MICRON PERIOD ION-IMPLANTED BUBBLE TEST CIRCUITS

被引:1
作者
NELSON, TJ [1 ]
FRATELLO, VJ [1 ]
MUEHLNER, DJ [1 ]
ROMAN, BJ [1 ]
SLUSKY, SEG [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1109/TMAG.1986.1064278
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:93 / 100
页数:8
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