A MODEL FOR CALCULATING SECONDARY AND BACKSCATTERED ELECTRON YIELDS

被引:142
作者
JOY, DC [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源
JOURNAL OF MICROSCOPY-OXFORD | 1987年 / 147卷
关键词
D O I
10.1111/j.1365-2818.1987.tb02817.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:51 / 64
页数:14
相关论文
共 42 条
[1]   ELECTRON BACKSCATTERING FROM BULK MATERIALS [J].
ANTOLAK, AJ ;
WILLIAMSON, W .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :526-534
[2]  
BETHE H, 1930, ANN PHYS, V5, P235
[3]  
BISHOP HE, 1979, NBS SPECIAL PUBLICAT, V460, P5
[4]   RESOLUTION LIMITS IN SURFACE SCANNING ELECTRON-MICROSCOPE [J].
CATTO, CJD ;
SMITH, KCA .
JOURNAL OF MICROSCOPY-OXFORD, 1973, 98 (AUG) :417-435
[5]   SIMPLE CALCULATION OF ENERGY-DISTRIBUTION OF LOW-ENERGY SECONDARY ELECTRONS EMITTED FROM METALS UNDER ELECTRON-BOMBARDMENT [J].
CHUNG, MS ;
EVERHART, TE .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) :707-709
[6]   RESPONSE OF SI AND GAP P-N JUNCTIONS TO A 5- TO 40-KEV ELECTRON BEAM [J].
CZAJA, W .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (11) :4236-&
[7]  
DEKKER AJ, 1958, SOLID STATE PHYS, V6, P251
[8]  
DRESCHER H, 1970, Z ANGEW PHYSIK, V29, P331
[9]   A COMPARISON OF ELECTRON-TRANSPORT IN AES PES WITH NEUTRON-TRANSPORT THEORY [J].
DWYER, VM ;
MATTHEW, JAD .
SURFACE SCIENCE, 1985, 152 (APR) :884-894
[10]  
JONKER JLH, 1952, PHILIPS RES REP, V7, P1