MEDIUM-ENERGY BACKSCATTERED ELECTRON-DIFFRACTION AS A PROBE OF ELASTIC STRAIN IN EPITAXIAL OVERLAYERS

被引:23
作者
CHAMBERS, SA
VITOMIROV, IM
ANDERSON, SB
WEAVER, JH
机构
[1] BOEING CO,CTR ELECTR HIGH TECHNOL,BOX 24969,MS9Z80,SEATTLE,WA 98124
[2] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455
来源
PHYSICAL REVIEW B | 1987年 / 35卷 / 05期
关键词
D O I
10.1103/PhysRevB.35.2490
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2490 / 2493
页数:4
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