CRYSTALLIZATION AND SINTERING CHARACTERISTICS OF CHEMICALLY VAPOR-DEPOSITED SILICON-NITRIDE POWDERS

被引：11

作者：

GOMEZALEIXANDRE, C

ALBELLA, JM

MARTINEZDUART, JM

ORGAZ, F

机构：

[1] CSIC,INST CIENCIA MAT,E-28049 MADRID,SPAIN

[2] ERCROS SA,CTR INVEST,E-28760 MADRID,SPAIN

来源：

JOURNAL OF MATERIALS RESEARCH | 1992年 / 7卷 / 10期

关键词：

D O I：

10.1557/JMR.1992.2864

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High purity silicon nitride powders have been obtained by Chemical Vapor Deposition (CVD), through the reaction of SiH4 and NH3 gas mixtures at 1000-degrees-C in a quartz reactor. The crystallization characteristics of the powder have been followed by infrared and x-ray diffraction analysis. The material shows a transition from amorphous to the alpha-phase after a thermal treatment at about 1300-degrees-C for 1 h, while the beta-phase starts to appear at 1725-degrees-C. The sintering properties of the amorphous and crystalline phases were evaluated by measuring the dilatometric curves of compacted powders.

引用

页码：2864 / 2868

页数：5

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