DOPING OF AMORPHOUS-GERMANIUM BY THE ION-IMPLANTATION METHOD

被引:0
作者
KHOKHLOV, AF
ERSHOV, AV
MASHIN, AI
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SOVIET PHYSICS SEMICONDUCTORS-USSR | 1984年 / 18卷 / 09期
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中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
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页码:1003 / 1006
页数:4
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[1]   OPTICAL AND ELECTRICAL PROPERTIES OF BORON-IMPLANTED AMORPHOUS-GERMANIUM THIN-FILMS [J].
ANDERSON, GW ;
DAVEY, JE ;
COMAS, J ;
SAKS, NS ;
LUCKE, WH .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (10) :4528-4533
[2]   DOPING EFFECTS OF INDIUM ON AMORPHOUS-GERMANIUM [J].
ARAKI, M ;
OZAKI, H .
SOLID STATE COMMUNICATIONS, 1976, 18 (11-1) :1603-1605
[3]   PHYSICAL CHARACTERIZATION OF HALOGENATED AND HYDROGENATED AMORPHOUS-SILICON FILMS [J].
AUGELLI, V ;
MURRI, R ;
GALASSINI, S ;
TEPORE, A .
THIN SOLID FILMS, 1980, 69 (03) :315-320
[4]  
BONCHBRUEVICH VL, 1981, ELECTRON THEORY DISO
[5]   PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J].
BRODSKY, MH .
THIN SOLID FILMS, 1978, 50 (MAY) :57-67
[6]   USE OF HYDROGENATION IN STRUCTURAL AND ELECTRONIC STUDIES OF GAP STATES IN AMORPHOUS-GERMANIUM [J].
CONNELL, GAN ;
PAWLIK, JR .
PHYSICAL REVIEW B, 1976, 13 (02) :787-804
[7]  
DVURECHENSKY AV, 1983, 7TH P INT C ION IMPL, P132
[8]   CONNECTION BETWEEN ESR AND ELECTRICAL-CONDUCTION IN AMORPHOUS SI FILMS [J].
HASEGAWA, S ;
YAZAKI, S .
SOLID STATE COMMUNICATIONS, 1977, 23 (01) :41-44
[9]   THE EFFECTS OF ION-IMPLANTATION ON THE ELECTRICAL-PROPERTIES OF AMORPHOUS-SILICON [J].
KALBITZER, S ;
MULLER, G ;
LECOMBER, PG ;
SPEAR, WE .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1980, 41 (04) :439-456
[10]  
KHOKHLOV AF, 1983, 7TH INT C ION IMPL S, P209