共 50 条
- [1] MODELING OF DIFFUSION DURING RAPID THERMAL-PROCESSING PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 106 - 113
- [3] SIMULATION OF TEMPERATURE EFFECTS DURING RAPID THERMAL-PROCESSING RAPID THERMAL ANNEALING / CHEMICAL VAPOR DEPOSITION AND INTEGRATED PROCESSING, 1989, 146 : 473 - 482
- [5] MODELING OF WAFER HEATING DURING RAPID THERMAL-PROCESSING APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (02): : 141 - 150
- [10] SILICIDATION BY RAPID THERMAL-PROCESSING REDUCED THERMAL PROCESSING FOR ULSI, 1989, 207 : 53 - 115