EFFECT OF SPUTTERING PRESSURE ON THE STRUCTURE AND SOLID-STATE REACTION OF TITANIUM-NICKEL COMPOSITIONALLY MODULATED FILM

被引：51
作者：
CLEMENS, BM
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 09期
关键词：
D O I：
10.1063/1.338413
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4525 / 4529
页数：5
相关论文
共 21 条
[1]   FORMATION AND GROWTH OF AMORPHOUS PHASES BY SOLID-STATE REACTION IN ELEMENTAL COMPOSITES PREPARED BY COLD-WORKING [J].
ATZMON, M ;
VERHOEVEN, JD ;
GIBSON, ED ;
JOHNSON, WL .
APPLIED PHYSICS LETTERS, 1984, 45 (10) :1052-1053
[2]  
BARBEE TW, 1985, SYNTHETIC MODULATED, P320
[3]  
BARTRAM SF, 1967, HDB XRAYS, P17
[4]   SOLID-STATE REACTION AND STRUCTURE IN COMPOSITIONALLY MODULATED ZIRCONIUM-NICKEL AND TITANIUM-NICKEL FILMS [J].
CLEMENS, BM .
PHYSICAL REVIEW B, 1986, 33 (11) :7615-7624
[5]   AMORPHOUS ZIRCONIUM NICKEL FILMS FORMED BY SOLID-STATE REACTIONS [J].
CLEMENS, BM ;
JOHNSON, WL ;
SCHWARZ, RB .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 61-2 (JAN) :817-822
[6]  
CLEMENS BM, IN PRESS PHYS REV B
[7]  
CULLITY DB, 1959, ELEMENTS XRAY DIFFRA, P107
[8]   EFFECTS OF SUBSTRATE ORIENTATION AND ROTATION ON INTERNAL-STRESSES IN SPUTTERED METAL-FILMS [J].
HOFFMAN, DW ;
THORNTON, JA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :134-137
[9]   STRESS AND PROPERTY CONTROL IN SPUTTERED METAL-FILMS WITHOUT SUBSTRATE BIAS [J].
HOFFMAN, DW .
THIN SOLID FILMS, 1983, 107 (04) :353-358
[10]  
KAHN MR, 1983, PHYS REV B, V27, P7186
123