PRODUCTION TECHNIQUE FOR EVAPORATION OF AL-SI FILMS FROM A SINGLE SOURCE ALLOY USING RF INDUCTION-HEATING

被引：0
|
作者：
MILLS, TM [1 ]
机构：
[1] NATL SEMICOND LTD,GREENOCK,SCOTLAND
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 08期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C269 / C269
页数：1
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