FABRICATION OF CONTINUOUS-RELIEF MICRO-OPTICAL ELEMENTS BY DIRECT LASER WRITING IN PHOTORESISTS

被引：240

作者：

GALE, MT

ROSSI, M

PEDERSEN, J

SCHUTZ, H

机构：

来源：

OPTICAL ENGINEERING | 1994年 / 33卷 / 11期

关键词：

MICROOPTICS; PLANAR OPTICAL ELEMENTS; DIRECT LASER WRITING; REPLICATION;

D O I：

10.1117/12.179892

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A laser writing system for the fabrication of continuous-relief micro-optical elements in photoresist is described. The technology enables a wide range of planar micro-optical elements to be fabricated and replicated into polymer film using Ni shims electroformed from the photoresist originals. The advantages and limitations of laser writing technology for micro-optics fabrication are discussed. Examples of fabricated micro-optical elements include Fresnel microlenses and microlens arrays, kinoforms, and other continuous-relief phase elements.

引用

页码：3556 / 3566

页数：11

共 19 条

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