AN INTEGRATED-OPTIC ADIABATIC TE TM MODE SPLITTER ON SILICON

被引：33

作者：

DERIDDER, RM

SANDER, AFM

DRIESSEN, A

FLUITMAN, JHJ

机构：

[1] Univ of Twente, Enschede

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1993年 / 11卷 / 11期

关键词：

D O I：

10.1109/50.251178

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, has been designed using the discrete sine method (DSM) and the beam propagation method (BPM), realized, and tested. The structures were fabricated in a system of SiO2, SiO(x)N(y), and Si3N4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing.

引用

页码：1806 / 1811

页数：6

共 17 条

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